Sputtering rate of micromilling on water ice with focused...

Journal of Vacuum Science & Technology A Vacuum Surfaces and Films 2008 Vol. 26; Iss. 3

Sputtering rate of micromilling on water ice with focused ion beam in a cryogenic environment

Fu, Jing, Joshi, Sanjay B., Catchmark, Jeffrey M.
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Volume:
26
Year:
2008
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2902962
File:
PDF, 635 KB
english, 2008
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