Effects of annealing in N[sub 2] on sputtered Al-doped ZnO...

Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures 2009 Vol. 27; Iss. 3

Effects of annealing in N[sub 2] on sputtered Al-doped ZnO thin films

Lennon, C., Kodama, R., Chang, Y., Sivananthan, S., Deshpande, M.
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Volume:
27
Year:
2009
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3110020
File:
PDF, 747 KB
english, 2009
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