Influence of surface bow on reconstruction on 2-inch SiC...

Journal of Applied Physics 2012 Vol. 111; Iss. 2

Influence of surface bow on reconstruction on 2-inch SiC (0001) wafer

Zhu, Ming-Xing, Chen, Yi, Shi, Biao, Liu, Xue-Chao, Chang, Shao-Hui, Yan, Cheng-Feng, Yang, Jian-Hua, Shi, Er-Wei
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Volume:
111
Year:
2012
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3679130
File:
PDF, 2.39 MB
english, 2012
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