Radiation damage in SiO2/Si induced by low-energy electrons...

Radiation damage in SiO2/Si induced by low-energy electrons via plasmon excitation

Yunogami, Takashi, Mizutani, Tatsumi
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Volume:
73
Year:
1993
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.353433
File:
PDF, 837 KB
english, 1993
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