Heat transfer analysis and optimization of two-beam microelectromechanical thermal actuators
Hickey, Ryan, Kujath, Marek, Hubbard, TedVolume:
20
Year:
2002
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1468654
File:
PDF, 441 KB
english, 2002