High piezoelectricity of Pb(Zr,Ti)O[sub 3]-based ternary compound thin films on silicon substrates
Zhang, Tao, Wasa, Kiyotaka, Zhang, Shu-yi, Chen, Zhao-jiang, Zhou, Feng-mei, Zhang, Zhong-ning, Yang, Yue-taoVolume:
94
Year:
2009
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.3103553
File:
PDF, 442 KB
english, 2009