[IEEE 2004 IEEE International Conference on Semiconductor Electronics - Kuala Lumpur, Malaysia (2004.12.7-2004.12.9)] 2004 IEEE International Conference on Semiconductor Electronics - The surface site dehydration mechanism for Si/sub 3/N/sub 4/ sensing membrane by post-baking treatment
Chao-Sung Lai,, Chia-Ming Yang,, Chih-Yao Wang,, Cheng-En Lue,, Lue, T.F., Hung-Pin Ko,, Wang, T.M.Year:
2004
Language:
english
DOI:
10.1109/smelec.2004.1620892
File:
PDF, 1.28 MB
english, 2004