Data coding tools for color-coded vector nanolithography

Review of Scientific Instruments 2004 Vol. 75; Iss. 11

Data coding tools for color-coded vector nanolithography

Lekki, Janusz, Kumar, Saveen, Parihar, Sunil S., Grange, Sebastien, Baur, Charles, Foschia, Raphael, Kulik, Andrzej
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Volume:
75
Year:
2004
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1805014
File:
PDF, 821 KB
english, 2004
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