Desorption from oxide films made by plasma enhanced...

Journal of Vacuum Science & Technology B Microelectronics and Nanometer Structures 1991 / 11 Vol. 9; Iss. 6

Desorption from oxide films made by plasma enhanced chemical vapor deposition using tetraethylorthosilicate

Tompkins, Harland G.
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Volume:
9
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.585640
Date:
November, 1991
File:
PDF, 609 KB
english, 1991
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