Improved Leakage and Reliability for ${\rm ZrLaO}_{x}/{\rm...

IEEE Electron Device Letters 2013 / 07 Vol. 34; Iss. 7

Improved Leakage and Reliability for ${\rm ZrLaO}_{x}/{\rm ZrTiO}_{x}/{\rm ZrLaO}_{x}$-Based MIM Capacitors by Plasma Nitridation

Lin, Chia-Chun, Wu, Yung-Hsien, Jiang, Ren-Siang, Lin, Yu-Bo, Yu, Meng-Ting, Sun, Cherng-En
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Volume:
34
Language:
english
Journal:
IEEE Electron Device Letters
DOI:
10.1109/led.2013.2264748
Date:
July, 2013
File:
PDF, 405 KB
english, 2013
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