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Characterization of plasma chemistry and ion energy in cathodic arc plasma from Ti-Si cathodes of different compositions
Eriksson, A. O., Zhirkov, I., Dahlqvist, M., Jensen, J., Hultman, L., Rosen, J.Volume:
113
Year:
2013
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.4802433
File:
PDF, 1.76 MB
english, 2013