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Metrology and characterization of application specific chemical mechanical polishing pads
Zantye, Parshuram B., Mudhivarthi, S., Kumar, Ashok, Obeng, YawVolume:
23
Year:
2005
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.2013319
File:
PDF, 750 KB
english, 2005