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Plasma enhanced chemical vapor deposition of palladium in anodic aluminum oxide template
Young-Soon Kim, V.P. Godbole, Joong-Hee Cho, Gilson Khang, Hyung-Shik ShinVolume:
6
Year:
2006
Language:
english
Pages:
1
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2006.01.012
File:
PDF, 357 KB
english, 2006