[IEEE 2007 Digest of papers Microprocesses and Nanotechnology - Kyoto, Japan (2007.11.5-2007.11.8)] 2007 Digest of papers Microprocesses and Nanotechnology - Effects of rate constant for deprotection reaction on latent image formation in chemically amplified EUV resists
Kozawa, Takahiro, Tagawa, Seiichi, Santillan, Julius Joseph, Toriumi, Minoru, Itani, ToshiroYear:
2007
Language:
english
DOI:
10.1109/imnc.2007.4456292
File:
PDF, 549 KB
english, 2007