Substrate bias effects during diamond like carbon film...

Current Applied Physics 2008 Vol. 8; Iss. 1

Substrate bias effects during diamond like carbon film deposition by microwave ECR plasma CVD

R.M. Dey, S.B. Singh, A. Biswas, R.B. Tokas, N. Chand, S. Venkateshwaran, D. Bhattacharya, N.K. Sahoo, S.W. Gosavi, S.K. Kulkarni, D.S. Patil
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Volume:
8
Year:
2008
Language:
english
Pages:
7
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2007.03.010
File:
PDF, 891 KB
english, 2008
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