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C+-energy-dependent residual ion damage in GaAs:C grown by the low-energy ion-beam doping method
Iida, Tsutomu, Makita, Yunosuke, Shima, Takayuki, Kimura, Shinji, Horn, Joachim, Hartnagel, Hans L., Uekusa, Shin-ichiroVolume:
80
Year:
1996
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.363306
File:
PDF, 413 KB
english, 1996