Geometry and properties of the plasma in a quadrupole ion...

Geometry and properties of the plasma in a quadrupole ion pump

Schwarz, Helmut
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Volume:
14
Language:
english
Journal:
Journal of Vacuum Science and Technology
DOI:
10.1116/1.569191
Date:
March, 1977
File:
PDF, 473 KB
english, 1977
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