A numerical study of the effect of gas injection position...

Current Applied Physics 2009 Vol. 9; Iss. 2

A numerical study of the effect of gas injection position in an inductively coupled plasma discharge

Deuk Chul Kwon, N.S. Yoon, J.H. Han, J.W. Shon
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Volume:
9
Year:
2009
Language:
english
Pages:
5
Journal:
Current Applied Physics
DOI:
10.1016/j.cap.2008.03.022
File:
PDF, 289 KB
english, 2009
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