Polymer diffusion as a probe of damage in ion or plasma...

Journal of Applied Physics 1990 Vol. 68; Iss. 6

Polymer diffusion as a probe of damage in ion or plasma etching

Tead, S. F., Vanderlinde, W. E., Marra, G., Ruoff, A. L., Kramer, E. J., Egitto, F. D.
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Volume:
68
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.346433
File:
PDF, 1.58 MB
english, 1990
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