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Design and fabrication of an L-type waveguide megasonic system for cleaning of nano-scale patterns
Hyunse Kim, Yanglae Lee, Euisu LimVolume:
9
Year:
2009
Language:
english
Pages:
1
DOI:
10.1016/j.cap.2008.12.058
File:
PDF, 435 KB
english, 2009