Dissociative adsorption of Si2H6 on silicon at hyperthermal energies: The influence of surface structure
Engstrom, J. R., Xia, L.-Q., Furjanic, M. J., Hansen, D. A.Volume:
63
Year:
1993
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.110674
File:
PDF, 638 KB
english, 1993