Effect of substrate temperature on the nanostructural and chemical features of nc-Si:H thin films prepared by PECVD
Jong-Ick Son, Jae-Hyun Shim, Nam-Hee ChoVolume:
10
Year:
2010
Language:
english
Pages:
1
DOI:
10.1016/j.cap.2009.12.030
File:
PDF, 618 KB
english, 2010