Impact of bias power-induced ion energy on refractive index...

Current Applied Physics 2010 Vol. 10; Iss. 3-supp-S

Impact of bias power-induced ion energy on refractive index of SiN films room-temperature deposited in SiH4–NH3–N2 pulsed plasma

Sanghee Kwon, Hwajun Lee, Byungwhan Kim
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Volume:
10
Year:
2010
Language:
english
Pages:
1
DOI:
10.1016/j.cap.2009.12.031
File:
PDF, 336 KB
english, 2010
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