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Determination of the d[sub 31] piezoelectric coefficient of PbZr[sub x]Ti[sub 1−x]O[sub 3] thin films using multilayer buckled micromembranes
Ayela, C., Nicu, L., Soyer, C., Cattan, E., Bergaud, C.Volume:
100
Year:
2006
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.2338139
File:
PDF, 1.02 MB
english, 2006