Development and application of a nozzle-beam-type microwave...

Review of Scientific Instruments 1995 Vol. 66; Iss. 2

Development and application of a nozzle-beam-type microwave radical source

Yoshida, Yoshikazu, Ito, Katsuyuki, Okazaki, Yasunao, Mitsuyu, Tsuneo, Mizuguchi, Shin-Ichi
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Volume:
66
Year:
1995
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1146517
File:
PDF, 641 KB
english, 1995
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