Ion beam analysis of sputtered AlN films
Arshad Mahmood, E. Andrade, S. Muhl, A. Shah, M. Khizar, M. Yasin Akhtar RajaVolume:
11
Year:
2011
Language:
english
Pages:
6
DOI:
10.1016/j.cap.2010.07.003
File:
PDF, 524 KB
english, 2011