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Improving the accuracy of walking piezo motors
den Heijer, M., Fokkema, V., Saedi, A., Schakel, P., Rost, M. J.Volume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4878624
Date:
May, 2014
File:
PDF, 1.01 MB
english, 2014