Current density profile extraction of focused ion beams...

Current density profile extraction of focused ion beams based on atomic force microscopy contour profiling of nanodots

Lugstein, A., Basnar, B., Hobler, G., Bertagnolli, E.
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Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1505685
File:
PDF, 412 KB
english, 2002
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