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Current density profile extraction of focused ion beams based on atomic force microscopy contour profiling of nanodots
Lugstein, A., Basnar, B., Hobler, G., Bertagnolli, E.Volume:
92
Year:
2002
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.1505685
File:
PDF, 412 KB
english, 2002