Influence of the different operations of gas in the large microwave plasmas
Wu, Cong-Feng, Huang, Wei-Dong, Zhan, Ru-JuanVolume:
19
Year:
2001
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1351000
File:
PDF, 431 KB
english, 2001