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[IEEE 2012 Winter Simulation Conference - (WSC 2012) - Berlin, Germany (2012.12.9-2012.12.12)] Proceedings Title: Proceedings of the 2012 Winter Simulation Conference (WSC) - Identifying ill tool combinations via Gibbs Sampler for semiconductor manufacturing yield diagnosis
Hsu, Yu-Chin, Chen, Rong-Huei, Fan, Chih-MinYear:
2012
Language:
english
DOI:
10.1109/wsc.2012.6465278
File:
PDF, 346 KB
english, 2012