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Anisotropic dry etching of boron doped single crystal CVD diamond
Johannes Enlund, Jan Isberg, Mikael Karlsson, Fredrik Nikolajeff, Jörgen Olsson, Daniel J. TwitchenVolume:
43
Year:
2005
Language:
english
Pages:
4
DOI:
10.1016/j.carbon.2005.02.022
File:
PDF, 195 KB
english, 2005