Metal ion source using rf discharge combined with...

Metal ion source using rf discharge combined with sputtering

Saito, Yukinori, Mitsuoka, Yasuaki, Suganomata, Shinji
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Volume:
55
Year:
1984
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1137672
File:
PDF, 455 KB
english, 1984
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