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[IEEE 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Banff, AB, Canada (25-27 Aug. 2004)] 2004 International Conference on MEMS, NANO and Smart Systems (ICMENS'04) - Theoretical Calculation of TAM and Correction of Topography
Sidan Du,, Lian Cai,, Duntang Gao,Year:
2004
Language:
english
DOI:
10.1109/icmens.2004.1509009
File:
PDF, 113 KB
english, 2004