Optimization of Ge/C ratio for compensation of misfit strain in solid phase epitaxial growth of SiGe layers
Im, Seongil, Washburn, Jack, Gronsky, Ronald, Cheung, Nathan W., Yu, Kin Man, Ager, Joel W.Volume:
63
Year:
1993
Language:
english
Journal:
Applied Physics Letters
DOI:
10.1063/1.110419
File:
PDF, 600 KB
english, 1993