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Composition and strain in thin Si[sub 1−x]Ge[sub x] virtual substrates measured by micro-Raman spectroscopy and x-ray diffraction
Perova, T. S., Wasyluk, J., Lyutovich, K., Kasper, E., Oehme, M., Rode, K., Waldron, A.Volume:
109
Year:
2011
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3536508
File:
PDF, 583 KB
english, 2011