[IEEE 2009 IEEE International Conference of Electron...

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[IEEE 2009 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC 2009) - Xi'an (2009.12.25-2009.12.27)] 2009 IEEE International Conference of Electron Devices and Solid-State Circuits (EDSSC) - Annealing effects on structural, optical and electrical properties of Al implanted 4H-SiC

Mingkun Zhang,, Jun Huang,, Rongdun Hong,, Xiaping Chen,, Zhengyun Wu,
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Year:
2009
Language:
english
DOI:
10.1109/edssc.2009.5394252
File:
PDF, 4.73 MB
english, 2009
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