Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
2011 Vol. 29; Iss. 4
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Perforated (In)GaSb quantum wells on GaSb substrates through the use of As[sub 2] based in situ etches
Ahirwar, P., Clark, S. P.R., Patel, V., Rotter, T. J., Hains, C., Albrecht, A., Dawson, L. R., Balakrishnan, G.Volume:
29
Year:
2011
Language:
english
Journal:
Journal of Vacuum Science & Technology B: Microelectronics and Nanometer Structures
DOI:
10.1116/1.3607600
File:
PDF, 844 KB
english, 2011