[IEEE TRANSDUCERS 2011 - 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - Beijing, China (2011.06.5-2011.06.9)] 2011 16th International Solid-State Sensors, Actuators and Microsystems Conference - An SOI 3-axis accelerometer with a zigzag-shaped Z-electrode for differential detection
Fujiyoshi, M., Nonomura, Y., Funabashi, H., Omura, Y., Akashi, T., Hata, Y., Yamada, H., Esashi, M.Year:
2011
Language:
english
DOI:
10.1109/transducers.2011.5969156
File:
PDF, 3.63 MB
english, 2011