The evolution of vacancy-type defects in silicon-on-insulator structures studied by positron annihilation spectroscopy
Coleman, P. G., Nash, D., Edwardson, C. J., Knights, A. P., Gwilliam, R. M.Volume:
110
Year:
2011
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.3605487
File:
PDF, 454 KB
english, 2011