Pt/Ti/n-InP nonalloyed ohmic contacts formed by rapid...

Pt/Ti/n-InP nonalloyed ohmic contacts formed by rapid thermal processing

Katz, A., Weir, B. E., Chu, S. N. G., Thomas, P. M., Soler, M., Boone, T., Dautremont-Smith, W. C.
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Volume:
67
Year:
1990
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.344986
File:
PDF, 621 KB
english, 1990
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