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A modified molecular beam instrument for the imaging of radicals interacting with surfaces during plasma processing
McCurdy, Patrick R., Bogart, K. H. A., Dalleska, N. F., Fisher, Ellen R.Volume:
68
Year:
1997
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1147976
File:
PDF, 1.33 MB
english, 1997