First phase nucleation of metal-rich silicide in Ta/Si...

First phase nucleation of metal-rich silicide in Ta/Si systems

Noya, Atsushi, Takeyama, Mayumi, Sasaki, Katsutaka, Nakanishi, Taichi

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Volume:

Year:

1994

Language:

english

Journal:

Journal of Applied Physics

DOI:

10.1063/1.357394

File:

PDF, 596 KB

english, 1994

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