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First phase nucleation of metal-rich silicide in Ta/Si systems
Noya, Atsushi, Takeyama, Mayumi, Sasaki, Katsutaka, Nakanishi, TaichiVolume:
76
Year:
1994
Language:
english
Journal:
Journal of Applied Physics
DOI:
10.1063/1.357394
File:
PDF, 596 KB
english, 1994