A new flexible scatterometer for critical dimension...

Review of Scientific Instruments 2010 Vol. 81; Iss. 2

A new flexible scatterometer for critical dimension metrology

Wurm, Matthias, Pilarski, Frank, Bodermann, Bernd
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Volume:
81
Year:
2010
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.3280160
File:
PDF, 825 KB
english, 2010
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