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An experimental comparison of proportional-integral, sliding mode, and robust adaptive control for piezo-actuated nanopositioning stages
Gu, Guo-Ying, Zhu, Li-MinVolume:
85
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.4876596
Date:
May, 2014
File:
PDF, 1.69 MB
english, 2014