Gamma Irradiation Effects on Surface-Micromachined...

Journal of Microelectromechanical Systems 2011 / 10 Vol. 20; Iss. 5

Gamma Irradiation Effects on Surface-Micromachined Polysilicon Resonators

Wang, Lei, Tang, Jieying, Huang, Qing-An
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Volume:
20
Language:
english
Journal:
Journal of Microelectromechanical Systems
DOI:
10.1109/jmems.2011.2162495
Date:
October, 2011
File:
PDF, 290 KB
english, 2011
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