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New photothermal deflection method for thermal diffusivity measurement of semiconductor wafers
Bertolotti, M., Dorogan, V., Liakhou, G., Li Voti, R., Paoloni, S., Sibilia, C.Volume:
68
Year:
1997
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1147589
File:
PDF, 459 KB
english, 1997