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Ultraviolet phase-modulated ellipsometer
Garcia-Caurel, Enric, Moncel, Jean Luc, Bos, Francis, Drévillon, BernardVolume:
73
Year:
2002
Language:
english
Journal:
Review of Scientific Instruments
DOI:
10.1063/1.1518788
File:
PDF, 435 KB
english, 2002