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Measurement of energy flux at the substrate in a magnetron sputter system using an integrated sensor
Ekpe, Samuel D., Dew, Steven K.Volume:
22
Year:
2004
Language:
english
Journal:
Journal of Vacuum Science & Technology A: Vacuum, Surfaces, and Films
DOI:
10.1116/1.1705640
File:
PDF, 391 KB
english, 2004