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[IEEE Technical Digest of the 18th International Vacuum Nanoelectronics Conference - Oxford, UK (10-14 July 2005)] 2005 International Vacuum Nanoelectronics Conference - Nanofabrication of templates with ultra sharp SiC tips for nanoimprint lithography
Yifang Chen,, Jiarui Tao,, Adnan Malik,, Xingzhong Zhao,, Zheng Cui,, Ejaz Huq,Year:
2005
Language:
english
DOI:
10.1109/ivnc.2005.1619575
File:
PDF, 875 KB
english, 2005