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[IRE 1983 International Electron Devices Meeting - ()] 1983 International Electron Devices Meeting - A high performance, high density 256K DRAM utilizing IX projection lithography
Adler, E., Bergendahl, A.S., Ellis, W., Fifield, J., O'Neil, E.F.Year:
1983
Language:
english
DOI:
10.1109/iedm.1983.190508
File:
PDF, 424 KB
english, 1983